@inproceedings{265d66521412476681e8a6c11ff150e1,
title = "Low-Loss Tantalum Pentoxide Photonics Based on Damascene Process",
abstract = "We demonstrate a low-loss Ta2O5 photonic platform using the Damascene process, presenting microring resonators with an intrinsic Q factor of 1.1 million and a waveguide propagation loss of 0.34 dB/cm.",
author = "Ruixuan Yi and Jinlong Lu and Xiaotong Zhang and Xuetao Gan",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 16th Pacific Rim Conference on Lasers and Electro-Optics, CLEO-PR 2024 ; Conference date: 04-08-2024 Through 09-08-2024",
year = "2024",
doi = "10.1109/CLEO-PR60912.2024.10676478",
language = "英语",
series = "16th Pacific Rim Conference on Lasers and Electro-Optics, CLEO-PR 2024",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "16th Pacific Rim Conference on Lasers and Electro-Optics, CLEO-PR 2024",
}