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Improving the precision of micromachined tuning fork gyroscope
Honglong Chang
,
Weizheng Yuan
School of Mechanical Engineering
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peer-review
1
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Engineering
Error Source
100%
Tuning Fork
100%
Drive Voltage
100%
Proof Mass
33%
Resonant Frequency
33%
Current Output
33%
Glass Substrate
33%
Demodulation
33%
Induced Charge
33%
Drive Mode
33%
Error Term
33%
Physics
Resonant Frequency
100%