High performance graphene oxide-based humidity sensor integrated on a photonic crystal cavity

Xuetao Gan; Chenyang Zhao; Qingchen Yuan; Liang Fang; Yongjiang Li; Jianbo Yin; Xiaoyan Ma; Jianlin Zhao

doi:10.1063/1.4980045

High performance graphene oxide-based humidity sensor integrated on a photonic crystal cavity

Xuetao Gan, Chenyang Zhao, Qingchen Yuan, Liang Fang, Yongjiang Li, Jianbo Yin, Xiaoyan Ma, Jianlin Zhao

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

35 Scopus citations

Abstract

We report a high performance relative humidity (RH) microsensor based on a few-layer graphene oxide (GO) flake coated photonic crystal (PC) cavity. Since the GO layer is highly water-reactive and interacts with the evanescent cavity mode strongly, the exposure of the GO-PC cavity in varied humidity levels results in significant resonant wavelength shifts, showing a slope of 0.68 nm/%RH in the range of 60%-85%RH. By monitoring the power variation of the cavity reflection, the microsensor presents an ultrahigh sensitivity exceeding 3.9 dB/%RH. Relying on the unimpeded permeation of water molecules through the GO interlayers and microscale distribution of the cavity mode, the integrated sensor has a response time less than 100 ms, which promises successful measurements of human breathing. Combining with the ease of fabrication, this high performance RH sensor provides great potentials in applications requiring optical access, device compactness, and fast dynamic response.

Original language	English
Article number	151107
Journal	Applied Physics Letters
Volume	110
Issue number	15
DOIs	https://doi.org/10.1063/1.4980045
State	Published - 10 Apr 2017

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@article{cea0fb12436846e5a65193f50d0bddc5,

title = "High performance graphene oxide-based humidity sensor integrated on a photonic crystal cavity",

abstract = "We report a high performance relative humidity (RH) microsensor based on a few-layer graphene oxide (GO) flake coated photonic crystal (PC) cavity. Since the GO layer is highly water-reactive and interacts with the evanescent cavity mode strongly, the exposure of the GO-PC cavity in varied humidity levels results in significant resonant wavelength shifts, showing a slope of 0.68 nm/%RH in the range of 60%-85%RH. By monitoring the power variation of the cavity reflection, the microsensor presents an ultrahigh sensitivity exceeding 3.9 dB/%RH. Relying on the unimpeded permeation of water molecules through the GO interlayers and microscale distribution of the cavity mode, the integrated sensor has a response time less than 100 ms, which promises successful measurements of human breathing. Combining with the ease of fabrication, this high performance RH sensor provides great potentials in applications requiring optical access, device compactness, and fast dynamic response.",

author = "Xuetao Gan and Chenyang Zhao and Qingchen Yuan and Liang Fang and Yongjiang Li and Jianbo Yin and Xiaoyan Ma and Jianlin Zhao",

note = "Publisher Copyright: {\textcopyright} 2017 Author(s).",

year = "2017",

month = apr,

day = "10",

doi = "10.1063/1.4980045",

language = "英语",

volume = "110",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "15",

}

TY - JOUR

T1 - High performance graphene oxide-based humidity sensor integrated on a photonic crystal cavity

AU - Gan, Xuetao

AU - Zhao, Chenyang

AU - Yuan, Qingchen

AU - Fang, Liang

AU - Li, Yongjiang

AU - Yin, Jianbo

AU - Ma, Xiaoyan

AU - Zhao, Jianlin

PY - 2017/4/10

Y1 - 2017/4/10

N2 - We report a high performance relative humidity (RH) microsensor based on a few-layer graphene oxide (GO) flake coated photonic crystal (PC) cavity. Since the GO layer is highly water-reactive and interacts with the evanescent cavity mode strongly, the exposure of the GO-PC cavity in varied humidity levels results in significant resonant wavelength shifts, showing a slope of 0.68 nm/%RH in the range of 60%-85%RH. By monitoring the power variation of the cavity reflection, the microsensor presents an ultrahigh sensitivity exceeding 3.9 dB/%RH. Relying on the unimpeded permeation of water molecules through the GO interlayers and microscale distribution of the cavity mode, the integrated sensor has a response time less than 100 ms, which promises successful measurements of human breathing. Combining with the ease of fabrication, this high performance RH sensor provides great potentials in applications requiring optical access, device compactness, and fast dynamic response.

AB - We report a high performance relative humidity (RH) microsensor based on a few-layer graphene oxide (GO) flake coated photonic crystal (PC) cavity. Since the GO layer is highly water-reactive and interacts with the evanescent cavity mode strongly, the exposure of the GO-PC cavity in varied humidity levels results in significant resonant wavelength shifts, showing a slope of 0.68 nm/%RH in the range of 60%-85%RH. By monitoring the power variation of the cavity reflection, the microsensor presents an ultrahigh sensitivity exceeding 3.9 dB/%RH. Relying on the unimpeded permeation of water molecules through the GO interlayers and microscale distribution of the cavity mode, the integrated sensor has a response time less than 100 ms, which promises successful measurements of human breathing. Combining with the ease of fabrication, this high performance RH sensor provides great potentials in applications requiring optical access, device compactness, and fast dynamic response.

UR - http://www.scopus.com/inward/record.url?scp=85017536232&partnerID=8YFLogxK

U2 - 10.1063/1.4980045

DO - 10.1063/1.4980045

M3 - 文章

AN - SCOPUS:85017536232

SN - 0003-6951

VL - 110

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 15

M1 - 151107

ER -

High performance graphene oxide-based humidity sensor integrated on a photonic crystal cavity

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