Elastic 3D Microelectrodes with Jellyfish-Like Microbumps and Grapping Strips as a Reliable Neural Interface

Fanqi Sun, Qing Liu, Xiaoli You, Zekai Liang, Kai Xue, Jun Guo, Minghao Wang, Jiahao Wang, Kai Tao, Honglong Chang, Bowen Ji

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

This work reports an elastic 3D microelectrode array with jellyfish-like microbumps and grapping strips for the first time. The soft silicone microbump wrapped by thin-film polyimide (PI) strips is formed by stress-free premolding and post injection molding. The elastic structure serves as a reliable neural interface to push the microelectrode sites closer to the dura mater for high-quality electrocorticogram (ECoG) recording. Besides, the elastic interface with sufficient mechanical strength can withstand the external pressure from overlay of dental cement or cranial window, thanks to its self-compression capability without debonding of grapping strips or electrochemical degradation. Thus, this bionic structure has advantages to reshape the traditional 2D electrodes to 3D for more durable neural recording, and avoid the unbuffered contact of the overlaid sealing cement or window to the underlying soft tissue.

Original languageEnglish
Title of host publicationIEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages410-413
Number of pages4
ISBN (Electronic)9798350357929
DOIs
StatePublished - 2024
Event37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 - Austin, United States
Duration: 21 Jan 202425 Jan 2024

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024
Country/TerritoryUnited States
CityAustin
Period21/01/2425/01/24

Keywords

  • Elastic 3D microelectrodes
  • Grapping strips
  • Microbumps
  • Neural interface

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