Fingerprint
Dive into the research topics of 'Effects of substrate bias and argon flux on the structure of titanium nitride films deposited by filtered cathodic arc plasma'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Effects of substrate bias and argon flux on the structure of titanium nitride films deposited by filtered cathodic arc plasma
Y. J. Zhang, P. X. Yan, Z. G. Wu, W. W. Zhang, G. A. Zhang, W. M. Liu, Q. J. Xue
Research output: Contribution to journal › Article › peer-review