Fingerprint
Dive into the research topics of 'Effects of residual stresses in thin films on performances of MEMS-based microgratings'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Effects of residual stresses in thin films on performances of MEMS-based microgratings
Yi Ting Yu, Wei Zheng Yuan, Qing Liang, Da Yong Qiao
Research output: Contribution to journal › Article › peer-review
1
Scopus
citations