Effects of negative substrate bias voltage on the structure and properties of aluminum oxide films prepared by DC reactive magnetron sputtering

Xiufeng Tang, Fa Luo, Fang Ou, Wancheng Zhou, Dongmei Zhu, Zhibin Huang

Research output: Contribution to journal › Article › peer-review

23 Scopus citations

Fingerprint

Dive into the research topics of 'Effects of negative substrate bias voltage on the structure and properties of aluminum oxide films prepared by DC reactive magnetron sputtering'. Together they form a unique fingerprint.

Engineering

Material Science