Effect of deposition temperature on boron-doped carbon coatings deposited from a BCl 3 -C 3 H 6 -H 2 mixture using low pressure chemical vapor deposition

Yongsheng Liu, Litong Zhang, Laifei Cheng, Wenbin Yang, Yongdong Xu

Research output: Contribution to journal › Article › peer-review

39 Scopus citations

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Chemical Engineering

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