Effect of deposition condition on deposition mode and morphology of pyrolytic carbon

The effects of deposition tempertature,flow of C₃H₆, total pressure on the morphology of deposits were studied with C₃H₆ as source material, Ar as dilute gas. Three kinds of morphology were accounted by using the principle of the nuclei-growth of crystal. It was showed that the deposition mode of pyrolytic carbon changes from surfacial nuclie-growth mode to droplet mode and gasous nuclie-borne mode as increasing deposition temperature and total pressure. The effect of flow of C₃H₆ on deposition mode underlies different principle under different deposition temperatures. The change of the morphology of pyrolytic carbon can be determined by the changes of deposition mode of pyrolytic carbon with deposition condition.