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Determination of mechanical behavior of MEMS materials
Zhongbin Tang,
Fei Xu
,
Yulong Li
School of Aeronautics
School of Civil Aviation
Northwestern Polytechnical University Xian
Research output
:
Contribution to journal
›
Article
›
peer-review
7
Scopus citations
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Material Science
Microelectromechanical System
100%
Tensile Testing
14%
Finite Element Method
14%
Thin Films
14%
Nanoindentation
14%
Strain Measurement
14%
Micro-Raman Spectroscopy
14%
Engineering
Thermal Force
14%
Bending Beam Test
14%
Bulge Test
14%