Abstract
Through analyzing the operating principles of the micro thermal sensor, associating with thin film resistor and the substrate, we got TCR of the resistor, and analyzed the method of calculation and measurement of the TCR and the resistively of MEMS thermal sensor. Then, we investigated the effectiveness of the resistor special dimension on the sensor performance. At last, we presented the design basis of the micro thermal sensor film material, the substrate, the dimension and the TCR of the thin film resistor, so we can offer references to thermal sensor's thin film resistor design and performance analysis.
| Original language | English |
|---|---|
| Pages (from-to) | 202-204 |
| Number of pages | 3 |
| Journal | Zhongguo Jixie Gongcheng/China Mechanical Engineering |
| Volume | 16 |
| Issue number | SUPPL. |
| State | Published - Jul 2005 |
Keywords
- Film resistor
- Micro sensor
- TCR
- Thermal device