Design investigation on micro thermal sensor film resistor

Kui Liu, Weizheng Yuan, Jinjun Deng, Binghe Ma, Chengyu Jiang

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Abstract

Through analyzing the operating principles of the micro thermal sensor, associating with thin film resistor and the substrate, we got TCR of the resistor, and analyzed the method of calculation and measurement of the TCR and the resistively of MEMS thermal sensor. Then, we investigated the effectiveness of the resistor special dimension on the sensor performance. At last, we presented the design basis of the micro thermal sensor film material, the substrate, the dimension and the TCR of the thin film resistor, so we can offer references to thermal sensor's thin film resistor design and performance analysis.

Original languageEnglish
Pages (from-to)202-204
Number of pages3
JournalZhongguo Jixie Gongcheng/China Mechanical Engineering
Volume16
Issue numberSUPPL.
StatePublished - Jul 2005

Keywords

  • Film resistor
  • Micro sensor
  • TCR
  • Thermal device

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