Design and microfabrication of radioisotope micro battery based on MEMS

Lei Sun; Wei Zheng Yuan; Da Yong Qiao

Design and microfabrication of radioisotope micro battery based on MEMS

Lei Sun, Wei Zheng Yuan, Da Yong Qiao

School of Mechanical Engineering

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

The principle, structure, and characteristics of ⁶³Ni radioisotope micro battery (RMB) were introduced. The equations of circuit current were established. Due to small surface area of the direct conversion device with the inverted triangle or pyramid structure in the traditional RMB, a direct conversion device with square arrays of vertical walls for RMB was designed to enlarge the surface area. The design for the structure of direct conversion device demonstrates that the best junction depth is about 2 μm-3 μm. A RMB was fabricated according to the above mentioned and its properties were measured. The results indicate that V_oc(open circuit voltage), J_SC(short circuit current density) and P_m(output power density) are respectively 127 mV, 4 nA/mm² and 0.41 nW/mm², which are in agreement with the expected values.

Original language	English
Pages (from-to)	32-35+48
Journal	Weixi Jiagong Jishu/Microfabrication Technology
Issue number	3
State	Published - Jun 2006

Keywords

Ni radioisotope micro battery
MEMS
Radiation activity
Source density
Square arrays of vertical walls

Cite this

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title = "Design and microfabrication of radioisotope micro battery based on MEMS",

abstract = "The principle, structure, and characteristics of 63Ni radioisotope micro battery (RMB) were introduced. The equations of circuit current were established. Due to small surface area of the direct conversion device with the inverted triangle or pyramid structure in the traditional RMB, a direct conversion device with square arrays of vertical walls for RMB was designed to enlarge the surface area. The design for the structure of direct conversion device demonstrates that the best junction depth is about 2 μm-3 μm. A RMB was fabricated according to the above mentioned and its properties were measured. The results indicate that Voc(open circuit voltage), JSC(short circuit current density) and Pm(output power density) are respectively 127 mV, 4 nA/mm2 and 0.41 nW/mm2, which are in agreement with the expected values.",

keywords = "Ni radioisotope micro battery, MEMS, Radiation activity, Source density, Square arrays of vertical walls",

author = "Lei Sun and Yuan, {Wei Zheng} and Qiao, {Da Yong}",

year = "2006",

month = jun,

language = "英语",

pages = "32--35+48",

journal = "Weixi Jiagong Jishu/Microfabrication Technology",

issn = "1003-8213",

publisher = "Weixi Jiagong Jishu",

number = "3",

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TY - JOUR

T1 - Design and microfabrication of radioisotope micro battery based on MEMS

AU - Sun, Lei

AU - Yuan, Wei Zheng

AU - Qiao, Da Yong

PY - 2006/6

Y1 - 2006/6

N2 - The principle, structure, and characteristics of 63Ni radioisotope micro battery (RMB) were introduced. The equations of circuit current were established. Due to small surface area of the direct conversion device with the inverted triangle or pyramid structure in the traditional RMB, a direct conversion device with square arrays of vertical walls for RMB was designed to enlarge the surface area. The design for the structure of direct conversion device demonstrates that the best junction depth is about 2 μm-3 μm. A RMB was fabricated according to the above mentioned and its properties were measured. The results indicate that Voc(open circuit voltage), JSC(short circuit current density) and Pm(output power density) are respectively 127 mV, 4 nA/mm2 and 0.41 nW/mm2, which are in agreement with the expected values.

AB - The principle, structure, and characteristics of 63Ni radioisotope micro battery (RMB) were introduced. The equations of circuit current were established. Due to small surface area of the direct conversion device with the inverted triangle or pyramid structure in the traditional RMB, a direct conversion device with square arrays of vertical walls for RMB was designed to enlarge the surface area. The design for the structure of direct conversion device demonstrates that the best junction depth is about 2 μm-3 μm. A RMB was fabricated according to the above mentioned and its properties were measured. The results indicate that Voc(open circuit voltage), JSC(short circuit current density) and Pm(output power density) are respectively 127 mV, 4 nA/mm2 and 0.41 nW/mm2, which are in agreement with the expected values.

KW - Ni radioisotope micro battery

KW - MEMS

KW - Radiation activity

KW - Source density

KW - Square arrays of vertical walls

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M3 - 文章

AN - SCOPUS:34249987165

SN - 1003-8213

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JO - Weixi Jiagong Jishu/Microfabrication Technology

JF - Weixi Jiagong Jishu/Microfabrication Technology

IS - 3

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Design and microfabrication of radioisotope micro battery based on MEMS

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