@inproceedings{65bf8aba6954479daa230cd97ba3c5e1,
title = "Design and fabrication of a Piezoelectric Micro Synthetic Jet Actuator",
abstract = "Synthetic Jet Actuator (SJA) is a new type actuator for active flow control applications. A Piezoelectric Micro SJA based on MEMS technology was present in this work. The simulation of device performance was carried out through a multi-domain coupled analysis model, and the relative error of jet velocity between simulation results and experiment data is less than 8%. A batch fabrication process was proposed to integrated fabrication of piezoelectric film and silicon structure. And using this process, prototype of micro SJA was gained. Preliminary tests of SJA's performance show that the max synthetic jet velocity (8.2m/s) is obtained as driving voltage is 25V and driving frequency close to the first-order natural frequency (10500Hz).",
keywords = "active flow control, MEMS, piezoelectric, Synthetic Jet Actuator",
author = "Jinjun Deng and Weizheng Yuan and Jian Luo and Dandong Shen and Binghe Ma",
year = "2011",
doi = "10.1109/NEMS.2011.6017353",
language = "英语",
isbn = "9781612847757",
series = "NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems",
pages = "301--304",
booktitle = "NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems",
note = "6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 ; Conference date: 20-02-2011 Through 23-02-2011",
}