Comparison in microstructure and mechanical properties of porous Si3N4 ceramics with SiC and Si3N4 coatings

Xiangming Li; Xiaowei Yin; Litong Zhang; Tianhao Pan

doi:10.1016/j.msea.2009.08.053

Comparison in microstructure and mechanical properties of porous Si₃N₄ ceramics with SiC and Si₃N₄ coatings

Xiangming Li, Xiaowei Yin, Litong Zhang, Tianhao Pan

School of Materials Sience and Engineering

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

27 Scopus citations

Abstract

Porous Si₃N₄ ceramic is gaining interest for its wide applications, but the low surface hardness decreases the mechanical erosion resistance, and many surface open pores decrease the moisture resistance seriously. Using chemical vapor deposition (CVD) of SiC and Si₃N₄, respectively, the surface of porous Si₃N₄ ceramic was densified. During CVD, the SiC and Si₃N₄ particulates deposited on the inner and on the outer surface of the porous Si₃N₄ ceramic leading to an obvious improvement of mechanical properties, especially for surface hardness. As the deposition content of SiC and Si₃N₄ increased, the mechanical properties of porous Si₃N₄ ceramic increased gradually with the total porosity decreasing slowly. After CVD, the pore size of porous Si₃N₄ ceramic decreased obviously, and the inner part of the porous Si₃N₄ ceramic was still porous.

Original language	English
Pages (from-to)	103-109
Number of pages	7
Journal	Materials Science and Engineering: A
Volume	527
Issue number	1-2
DOIs	https://doi.org/10.1016/j.msea.2009.08.053
State	Published - 15 Dec 2009

Keywords

Chemical vapor deposition
Mechanical properties
Porosity
SiN
SiC

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10.1016/j.msea.2009.08.053

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title = "Comparison in microstructure and mechanical properties of porous Si3N4 ceramics with SiC and Si3N4 coatings",

abstract = "Porous Si3N4 ceramic is gaining interest for its wide applications, but the low surface hardness decreases the mechanical erosion resistance, and many surface open pores decrease the moisture resistance seriously. Using chemical vapor deposition (CVD) of SiC and Si3N4, respectively, the surface of porous Si3N4 ceramic was densified. During CVD, the SiC and Si3N4 particulates deposited on the inner and on the outer surface of the porous Si3N4 ceramic leading to an obvious improvement of mechanical properties, especially for surface hardness. As the deposition content of SiC and Si3N4 increased, the mechanical properties of porous Si3N4 ceramic increased gradually with the total porosity decreasing slowly. After CVD, the pore size of porous Si3N4 ceramic decreased obviously, and the inner part of the porous Si3N4 ceramic was still porous.",

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author = "Xiangming Li and Xiaowei Yin and Litong Zhang and Tianhao Pan",

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AU - Li, Xiangming

AU - Yin, Xiaowei

AU - Zhang, Litong

AU - Pan, Tianhao

PY - 2009/12/15

Y1 - 2009/12/15

N2 - Porous Si3N4 ceramic is gaining interest for its wide applications, but the low surface hardness decreases the mechanical erosion resistance, and many surface open pores decrease the moisture resistance seriously. Using chemical vapor deposition (CVD) of SiC and Si3N4, respectively, the surface of porous Si3N4 ceramic was densified. During CVD, the SiC and Si3N4 particulates deposited on the inner and on the outer surface of the porous Si3N4 ceramic leading to an obvious improvement of mechanical properties, especially for surface hardness. As the deposition content of SiC and Si3N4 increased, the mechanical properties of porous Si3N4 ceramic increased gradually with the total porosity decreasing slowly. After CVD, the pore size of porous Si3N4 ceramic decreased obviously, and the inner part of the porous Si3N4 ceramic was still porous.

AB - Porous Si3N4 ceramic is gaining interest for its wide applications, but the low surface hardness decreases the mechanical erosion resistance, and many surface open pores decrease the moisture resistance seriously. Using chemical vapor deposition (CVD) of SiC and Si3N4, respectively, the surface of porous Si3N4 ceramic was densified. During CVD, the SiC and Si3N4 particulates deposited on the inner and on the outer surface of the porous Si3N4 ceramic leading to an obvious improvement of mechanical properties, especially for surface hardness. As the deposition content of SiC and Si3N4 increased, the mechanical properties of porous Si3N4 ceramic increased gradually with the total porosity decreasing slowly. After CVD, the pore size of porous Si3N4 ceramic decreased obviously, and the inner part of the porous Si3N4 ceramic was still porous.

KW - Chemical vapor deposition

KW - Mechanical properties

KW - Porosity

KW - SiN

KW - SiC

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Comparison in microstructure and mechanical properties of porous Si₃N₄ ceramics with SiC and Si₃N₄ coatings

Abstract

Keywords

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