Comparative study on different types of segmented micro deformable mirrors

In an adaptive-optical (AO) system, the wavefront of optical beam can be corrected with deformable mirror (DM). Based on MicroElectroMechanical System (MEMS) technology, segmented micro deformable mirrors can be built with denser actuator spacing than continuous face-sheet designs and have been widely researched. But the influence of the segment structure has not been thoroughly discussed until now. In this paper, the design, performance and fabrication of several micromachined, segmented deformable mirror for AO were investigated. The wavefront distorted by atmospheric turbulence was simulated in the frame of Kolmogorov turbulence model. Position function was used to describe the surfaces of the micro deformable mirrors in working state. The performances of deformable mirrors featuring square, brick, hexagonal and ring segment structures were evaluated in criteria of phase fitting error, the Strehl ratio after wavefront correction and the design considerations. Then the micro fabrication process and mask layout were designed and the fabrication of micro deformable mirrors was implemented. The results show that the micro deformable mirror with ring segments performs the best, but it is very difficult in terms of layout design. The micro deformable mirrors with square and brick segments are easy to design, but their performances are not good. The micro deformable mirror with hexagonal segments has not only good performance in terms of phase fitting error, the Strehl ratio and actuation voltage, but also no overwhelming difficulty in layout design.