@inproceedings{099f0a9ce9f44c418bd6860a2c968040,
title = "Atmospheric pressure mode localization coupled resonators force sensor",
abstract = "This paper reports on a 3-DoF mode localization resonant sensor experimentally evaluated under atmospheric conditions. It was demonstrated that using amplitude ratio as an output signal, even when the device is operated in air, yields a higher sensitivity compared to frequency variation sensitivity when assuming vacuum conditions.",
keywords = "Coupled Resonators, MEMS Sensors, Mode Localization",
author = "Montaseri, {M. H.} and J. Xie and H. Chang and Z. Chao and G. Wood and M. Kraft",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
year = "2015",
month = aug,
day = "5",
doi = "10.1109/TRANSDUCERS.2015.7181140",
language = "英语",
series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1183--1186",
booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
}