Fingerprint
Dive into the research topics of 'Application of curvature measurement technique for measuring residual stresses in MEMS thin films'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Application of curvature measurement technique for measuring residual stresses in MEMS thin films
Yiting Yu, Weizheng Yuan, Dayong Qiao
Research output: Contribution to journal › Article › peer-review