Analysis of lateral stability of electrostatic comb-drive structure

Feng Zhang; Weizheng Yuan; Honglong Chang; Jiliang Ding; Jianbing Xie

doi:10.3969/j.issn.1004-1699.2011.08.008

Analysis of lateral stability of electrostatic comb-drive structure

Feng Zhang, Weizheng Yuan, Honglong Chang, Jiliang Ding, Jianbing Xie

School of Mechanical Engineering

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Electrostatic comb-drive actuators have been widely used in MEMS field. In general, the traveling ranges of comb-drive actuators are limited by the lateral instabilities which cause a sudden snap between the movable comb fingers and the fixed fingers, resulting in functional failure. The lateral stability of the typical electrostatic comb structure was investigated. From theoretical simulations and experimental verifications, it was found that the ratio of lengthwise stiffness to transverse stiffness of the suspensions is a key factor for lateral stability. With increased stiffness ratio, the lateral stability of comb-drive structure is improved.

Original language	English
Pages (from-to)	1122-1125
Number of pages	4
Journal	Chinese Journal of Sensors and Actuators
Volume	24
Issue number	8
DOIs	https://doi.org/10.3969/j.issn.1004-1699.2011.08.008
State	Published - Aug 2011

Keywords

Electrostatic comb-drive structure
Lateral stability
Side pull-in
Stiffness

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10.3969/j.issn.1004-1699.2011.08.008

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AU - Zhang, Feng

AU - Yuan, Weizheng

AU - Chang, Honglong

AU - Ding, Jiliang

AU - Xie, Jianbing

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Y1 - 2011/8

N2 - Electrostatic comb-drive actuators have been widely used in MEMS field. In general, the traveling ranges of comb-drive actuators are limited by the lateral instabilities which cause a sudden snap between the movable comb fingers and the fixed fingers, resulting in functional failure. The lateral stability of the typical electrostatic comb structure was investigated. From theoretical simulations and experimental verifications, it was found that the ratio of lengthwise stiffness to transverse stiffness of the suspensions is a key factor for lateral stability. With increased stiffness ratio, the lateral stability of comb-drive structure is improved.

AB - Electrostatic comb-drive actuators have been widely used in MEMS field. In general, the traveling ranges of comb-drive actuators are limited by the lateral instabilities which cause a sudden snap between the movable comb fingers and the fixed fingers, resulting in functional failure. The lateral stability of the typical electrostatic comb structure was investigated. From theoretical simulations and experimental verifications, it was found that the ratio of lengthwise stiffness to transverse stiffness of the suspensions is a key factor for lateral stability. With increased stiffness ratio, the lateral stability of comb-drive structure is improved.

KW - Electrostatic comb-drive structure

KW - Lateral stability

KW - Side pull-in

KW - Stiffness

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Analysis of lateral stability of electrostatic comb-drive structure

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Keywords

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