Algebraic summation of eigenstates as a novel output metric to extend the linear sensing range of mode-localized sensors

Hemin Zhang, Jiming Zhong, Jing Yang, Weizheng Yuan, Hao Kang, Honglong Chang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

10 Scopus citations

Abstract

Frequency-modulated MEMS resonant sensors have been widely used in a variety of sensing applications. This recently emerging sensing mechanism, based on the mode localization of weakly coupled resonators, provides improved sensitivity of more than two orders of magnitude by selecting eigenstate or amplitude ratio as the output metric. However, the loci veering property of the new readout limits the linear sensing range of the mode-localized sensors. In this paper, we propose for the first time that using the algebraic summation of the amplitude ratios of the two vibration modes can enhance the linear sensing range to full-scale range. The measured linear sensing range ([-12, -2] N/m) of selecting algebraic summation as the output metric is more than 2 times larger than that ([-12, -8] N/m) of reading the amplitude ratio of a certain mode.

Original languageEnglish
Title of host publicationIEEE SENSORS 2017 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-3
Number of pages3
ISBN (Electronic)9781509010127
DOIs
StatePublished - 21 Dec 2017
Event16th IEEE SENSORS Conference, ICSENS 2017 - Glasgow, United Kingdom
Duration: 30 Oct 20171 Nov 2017

Publication series

NameProceedings of IEEE Sensors
Volume2017-December
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference16th IEEE SENSORS Conference, ICSENS 2017
Country/TerritoryUnited Kingdom
CityGlasgow
Period30/10/171/11/17

Keywords

  • linear sensing range
  • mode localization
  • resonant sensors

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