TY - GEN
T1 - Algebraic summation of eigenstates as a novel output metric to extend the linear sensing range of mode-localized sensors
AU - Zhang, Hemin
AU - Zhong, Jiming
AU - Yang, Jing
AU - Yuan, Weizheng
AU - Kang, Hao
AU - Chang, Honglong
N1 - Publisher Copyright:
© 2017 IEEE.
PY - 2017/12/21
Y1 - 2017/12/21
N2 - Frequency-modulated MEMS resonant sensors have been widely used in a variety of sensing applications. This recently emerging sensing mechanism, based on the mode localization of weakly coupled resonators, provides improved sensitivity of more than two orders of magnitude by selecting eigenstate or amplitude ratio as the output metric. However, the loci veering property of the new readout limits the linear sensing range of the mode-localized sensors. In this paper, we propose for the first time that using the algebraic summation of the amplitude ratios of the two vibration modes can enhance the linear sensing range to full-scale range. The measured linear sensing range ([-12, -2] N/m) of selecting algebraic summation as the output metric is more than 2 times larger than that ([-12, -8] N/m) of reading the amplitude ratio of a certain mode.
AB - Frequency-modulated MEMS resonant sensors have been widely used in a variety of sensing applications. This recently emerging sensing mechanism, based on the mode localization of weakly coupled resonators, provides improved sensitivity of more than two orders of magnitude by selecting eigenstate or amplitude ratio as the output metric. However, the loci veering property of the new readout limits the linear sensing range of the mode-localized sensors. In this paper, we propose for the first time that using the algebraic summation of the amplitude ratios of the two vibration modes can enhance the linear sensing range to full-scale range. The measured linear sensing range ([-12, -2] N/m) of selecting algebraic summation as the output metric is more than 2 times larger than that ([-12, -8] N/m) of reading the amplitude ratio of a certain mode.
KW - linear sensing range
KW - mode localization
KW - resonant sensors
UR - http://www.scopus.com/inward/record.url?scp=85044324385&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2017.8233869
DO - 10.1109/ICSENS.2017.8233869
M3 - 会议稿件
AN - SCOPUS:85044324385
T3 - Proceedings of IEEE Sensors
SP - 1
EP - 3
BT - IEEE SENSORS 2017 - Conference Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 16th IEEE SENSORS Conference, ICSENS 2017
Y2 - 30 October 2017 through 1 November 2017
ER -