Adaptive laser conditioning of reflective thin film based on photo thermal lens probe

Zhichao Liu; Yi Zheng; Qinghua Zhang; Feng Pan; Yaowei Wei; Jian Wang; Qiao Xu

doi:10.1063/1.5017187

Adaptive laser conditioning of reflective thin film based on photo thermal lens probe

Zhichao Liu, Yi Zheng, Qinghua Zhang, Feng Pan, Yaowei Wei, Jian Wang, Qiao Xu

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

A novel laser conditioning (LC) concept that performs adaptive control of exposure fluence is proposed. As photo-thermal absorption effect can discover defects responsible for laser-induced damage of reflective thin film, in situ photo-thermal lens probe is introduced in conventional LC procedure to detect defects during raster-scanning. The absorptance signal is fed back to guide the adaptive control of exposure fluence. By this method, the damage risk accompanying with LC can be reduced to a rather low level. In order to test the performance of adaptive laser conditioning (ALC), an experimental setup has been built, and several film samples have been tested. The results show that ALC is effective at reducing laser damage risk.

Original language	English
Article number	124901
Journal	Review of Scientific Instruments
Volume	88
Issue number	12
DOIs	https://doi.org/10.1063/1.5017187
State	Published - 1 Dec 2017
Externally published	Yes

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10.1063/1.5017187

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title = "Adaptive laser conditioning of reflective thin film based on photo thermal lens probe",

abstract = "A novel laser conditioning (LC) concept that performs adaptive control of exposure fluence is proposed. As photo-thermal absorption effect can discover defects responsible for laser-induced damage of reflective thin film, in situ photo-thermal lens probe is introduced in conventional LC procedure to detect defects during raster-scanning. The absorptance signal is fed back to guide the adaptive control of exposure fluence. By this method, the damage risk accompanying with LC can be reduced to a rather low level. In order to test the performance of adaptive laser conditioning (ALC), an experimental setup has been built, and several film samples have been tested. The results show that ALC is effective at reducing laser damage risk.",

author = "Zhichao Liu and Yi Zheng and Qinghua Zhang and Feng Pan and Yaowei Wei and Jian Wang and Qiao Xu",

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T1 - Adaptive laser conditioning of reflective thin film based on photo thermal lens probe

AU - Liu, Zhichao

AU - Zheng, Yi

AU - Zhang, Qinghua

AU - Pan, Feng

AU - Wei, Yaowei

AU - Wang, Jian

AU - Xu, Qiao

PY - 2017/12/1

Y1 - 2017/12/1

N2 - A novel laser conditioning (LC) concept that performs adaptive control of exposure fluence is proposed. As photo-thermal absorption effect can discover defects responsible for laser-induced damage of reflective thin film, in situ photo-thermal lens probe is introduced in conventional LC procedure to detect defects during raster-scanning. The absorptance signal is fed back to guide the adaptive control of exposure fluence. By this method, the damage risk accompanying with LC can be reduced to a rather low level. In order to test the performance of adaptive laser conditioning (ALC), an experimental setup has been built, and several film samples have been tested. The results show that ALC is effective at reducing laser damage risk.

AB - A novel laser conditioning (LC) concept that performs adaptive control of exposure fluence is proposed. As photo-thermal absorption effect can discover defects responsible for laser-induced damage of reflective thin film, in situ photo-thermal lens probe is introduced in conventional LC procedure to detect defects during raster-scanning. The absorptance signal is fed back to guide the adaptive control of exposure fluence. By this method, the damage risk accompanying with LC can be reduced to a rather low level. In order to test the performance of adaptive laser conditioning (ALC), an experimental setup has been built, and several film samples have been tested. The results show that ALC is effective at reducing laser damage risk.

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VL - 88

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

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ER -

Adaptive laser conditioning of reflective thin film based on photo thermal lens probe

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