A simple numerical method to study the far-field diffraction of optical MEMS devices with a large array and complex element geometry

Yi Ting Yu, Wei Zheng Yuan, Da Yong Qiao, Bin Yan

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Fingerprint

Dive into the research topics of 'A simple numerical method to study the far-field diffraction of optical MEMS devices with a large array and complex element geometry'. Together they form a unique fingerprint.

Physics

Material Science