A sandwich-structured MEMS electret power generator for multi-directional vibration energy harvesting

K. Tao, S. W. Lye, N. Wang, X. Hu, J. M. Miao

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

This paper presents the design, modeling and characterization of a compact MEMS electret power generator for multi-directional vibration energy harvesting. The device is built on a symmetrical square-shape resonator that could harvest kinetic energy from multiple directions by using two orthogonal vibration degrees of freedom. Sandwich structure is adopted not only to enhance the output performance, but also to reduce both vertical pull-in and horizontal electrostatic damping force with two separate 180° out-of-phase capacitive circuit. The generator can be a potential candidate towards a practical multi-directional energy harvesting device for low-level ambient vibrational energy harvesting.

Original languageEnglish
Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages51-54
Number of pages4
ISBN (Electronic)9781479989553
DOIs
StatePublished - 5 Aug 2015
Externally publishedYes
Event18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
Duration: 21 Jun 201525 Jun 2015

Publication series

Name2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Conference

Conference18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/TerritoryUnited States
CityAnchorage
Period21/06/1525/06/15

Keywords

  • Electret-based
  • Energy harvesting
  • MEMS
  • Multi-directional
  • Power generator
  • Sandwich

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