A multivariate process capability index with a spatial coefficient

Shaoxi Wang; Mingxin Wang; Xiaoya Fan; Shengbing Zhang; Ru Han

doi:10.1088/1674-4926/34/2/026001

A multivariate process capability index with a spatial coefficient

Shaoxi Wang, Mingxin Wang, Xiaoya Fan, Shengbing Zhang, Ru Han

School of Microelectronics

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

After analyzing the multivariate Cpm method (Chan et al. 1991), this paper presents a spatial multivariate process capability index (PCI) method, which can solve a multivariate off-centered case and may provide references for assuring and improving process quality level while achieving an overall evaluation of process quality. Examples for calculating multivariate PCI are given and the experimental results show that the systematic method presented is effective and actual.

Original language	English
Article number	026001
Journal	Journal of Semiconductors
Volume	34
Issue number	2
DOIs	https://doi.org/10.1088/1674-4926/34/2/026001
State	Published - Feb 2013

Keywords

multivariate
off-center
process
process capability index

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10.1088/1674-4926/34/2/026001

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abstract = "After analyzing the multivariate Cpm method (Chan et al. 1991), this paper presents a spatial multivariate process capability index (PCI) method, which can solve a multivariate off-centered case and may provide references for assuring and improving process quality level while achieving an overall evaluation of process quality. Examples for calculating multivariate PCI are given and the experimental results show that the systematic method presented is effective and actual.",

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AU - Fan, Xiaoya

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AB - After analyzing the multivariate Cpm method (Chan et al. 1991), this paper presents a spatial multivariate process capability index (PCI) method, which can solve a multivariate off-centered case and may provide references for assuring and improving process quality level while achieving an overall evaluation of process quality. Examples for calculating multivariate PCI are given and the experimental results show that the systematic method presented is effective and actual.

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KW - off-center

KW - process

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A multivariate process capability index with a spatial coefficient

Abstract

Keywords

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