A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow

Bin Nie; Weimin Wang; Fang Ye; Honglong Chang

doi:10.1109/MEMSYS.2017.7863603

A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow

Bin Nie, Weimin Wang, Fang Ye, Honglong Chang

Northwestern Polytechnical University Xian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

13 Scopus citations

Abstract

This paper reports a novel micromachined three-axis gas inertial sensor based on the bidirectional thermal expansion flow. Eight heaters and eight thermistors form a 'cross-shape' network to generate bidirectional thermal expansion flows for the thermos-resistive sensing of each thermistor. Thus, the Z-axis angular rate and X/Y-axis acceleration can be sensed simultaneously with a sensitivity of 1.370mV/°/s within the range of [-3240°/s, +3240°/s], 2.183V/g and 1.916V/g within the range of [-1g, +1g], respectively. The couplings between X/Y acceleration measurements have decreased to 0.678% and 2.924% respectively.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1091-1094
Number of pages	4
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863603
State	Published - 23 Feb 2017
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 22 Jan 2017 → 26 Jan 2017

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	22/01/17 → 26/01/17

Access to Document

10.1109/MEMSYS.2017.7863603

Cite this

Nie, B., Wang, W., Ye, F., & Chang, H. (2017). A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 1091-1094). Article 7863603 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863603

Nie, Bin ; Wang, Weimin ; Ye, Fang et al. / A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1091-1094 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow",

abstract = "This paper reports a novel micromachined three-axis gas inertial sensor based on the bidirectional thermal expansion flow. Eight heaters and eight thermistors form a 'cross-shape' network to generate bidirectional thermal expansion flows for the thermos-resistive sensing of each thermistor. Thus, the Z-axis angular rate and X/Y-axis acceleration can be sensed simultaneously with a sensitivity of 1.370mV/°/s within the range of [-3240°/s, +3240°/s], 2.183V/g and 1.916V/g within the range of [-1g, +1g], respectively. The couplings between X/Y acceleration measurements have decreased to 0.678% and 2.924% respectively.",

author = "Bin Nie and Weimin Wang and Fang Ye and Honglong Chang",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",

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series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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Nie, B, Wang, W, Ye, F & Chang, H 2017, A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863603, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 1091-1094, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 22/01/17. https://doi.org/10.1109/MEMSYS.2017.7863603

A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow. / Nie, Bin; Wang, Weimin; Ye, Fang et al.
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1091-1094 7863603 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - This paper reports a novel micromachined three-axis gas inertial sensor based on the bidirectional thermal expansion flow. Eight heaters and eight thermistors form a 'cross-shape' network to generate bidirectional thermal expansion flows for the thermos-resistive sensing of each thermistor. Thus, the Z-axis angular rate and X/Y-axis acceleration can be sensed simultaneously with a sensitivity of 1.370mV/°/s within the range of [-3240°/s, +3240°/s], 2.183V/g and 1.916V/g within the range of [-1g, +1g], respectively. The couplings between X/Y acceleration measurements have decreased to 0.678% and 2.924% respectively.

AB - This paper reports a novel micromachined three-axis gas inertial sensor based on the bidirectional thermal expansion flow. Eight heaters and eight thermistors form a 'cross-shape' network to generate bidirectional thermal expansion flows for the thermos-resistive sensing of each thermistor. Thus, the Z-axis angular rate and X/Y-axis acceleration can be sensed simultaneously with a sensitivity of 1.370mV/°/s within the range of [-3240°/s, +3240°/s], 2.183V/g and 1.916V/g within the range of [-1g, +1g], respectively. The couplings between X/Y acceleration measurements have decreased to 0.678% and 2.924% respectively.

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Nie B, Wang W, Ye F , Chang H. A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1091-1094. 7863603. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863603

A micromachined three-axis gas inertial sensor based on bidirectional thermal expansion flow

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