@inproceedings{d394c5d4c736464fbe45de436cdfbaad,
title = "A micromachined fluidic reduced inertial measurement unit using thermal expansion flow principle",
abstract = "This paper presents a micromachined fluidic integrated reduced inertial measurement unit based on the thermal expansion flow principle. The proposed multi-axis gas sensor can achieve the simultaneous detection of single-axis (Z-axis) angular rate and dual-axis (X-axis and Y-axis) acceleration using one chamber. To the best of the authors' knowledge, it is the first time that such a multi-axis thermal expansion flow inertial sensor is reported. A large measurement range has been demonstrated, e.g., the Z-axis gyroscope can achieve a sensitivity of 0.548 mV/°/s with a nonlinearity less than 3.87% within the input range of ±2160 °/s.",
keywords = "Thermal expansion flow, accelerometer, gyroscope, multi-axis gas sensor, thermistor",
author = "Wang, {S. S.} and Gong, {X. H.} and B. Nie and Yuan, {W. Z.} and Chang, {H. L.}",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
year = "2015",
month = aug,
day = "5",
doi = "10.1109/TRANSDUCERS.2015.7181150",
language = "英语",
series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1223--1226",
booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
}