A microgripper with a ratchet self-locking mechanism

Y. C. Hao, W. Z. Yuan, H. M. Zhang, H. L. Chang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

9 Scopus citations

Abstract

This paper reports a new design for an electrostatic actuated microgripper with a ratchet self-locking mechanism. The self-locking mechanism enables long-time gripping without continuously applying the external driving signal, such as an electrical, thermal or magnetic field, which significantly reduces the effect and damage on the gripped micro-scale objects that are induced by the external driving signals. The microgripper is fabricated using a silicon-on-insulator (SOI) wafer with a 30μm device layer. The jaw gap is 100 μm, and the ratchet locking interval is 10 μm. A metal wire is successfully gripped to demonstrate the feasibility of the ratchet self-locking mechanism.

Original languageEnglish
Title of host publication2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1106-1109
Number of pages4
EditionFebruary
ISBN (Electronic)9781479979554
DOIs
StatePublished - 26 Feb 2015
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: 18 Jan 201522 Jan 2015

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
NumberFebruary
Volume2015-February
ISSN (Print)1084-6999

Conference

Conference2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/TerritoryPortugal
CityEstoril
Period18/01/1522/01/15

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