@inproceedings{602962b82a364e7688d84b10f047c129,
title = "A Micro Resonant Electrometer with Single-Electron Charge Resolution at Room Temperature",
abstract = "The measurement of charge at single electron level at room temperature in analog and digital electronics is limited due to considerable thermal noise. In this work, we propose a method of charge detection with resolution of 0.17e/√Hz at room temperature by resonant electrometry based on tracking quasi-digital frequency shift of a force sensitive micromechanical oscillator stemming from the modal stiffness perturbation pertaining to charge input. We build a closed-loop system for the measurement and perform real-time monitoring of charge accumulation on the gate corresponding to 67 electrons per step. Analysis on thermomechanical noise suggests an ultimate threshold of charge resolution at the order of 10-4e/√Hz is possible benefitting from the high Q-factor of the resonator.",
keywords = "Charge, Electrometers, Frequency Modulation, MEMS, Oscillators, Resonators, Single Electron",
author = "Dongyang Chen and Hemin Zhang and Jiangkun Sun and Milind Pandit and Guillermo Sobreviela and Yong Wang and Qian Zhang and Ashwin Seshia and Jin Xie",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 ; Conference date: 18-01-2020 Through 22-01-2020",
year = "2020",
month = jan,
doi = "10.1109/MEMS46641.2020.9056373",
language = "英语",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "182--185",
booktitle = "33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020",
}