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A Hybrid MEMS Microphone Combining Piezoelectric and Capacitive Transduction Mechanisms
Yangyang Guan, Sina Sadeghpour, Chen Wang, Hemin Zhang, Sanjog Vilas Joshi, Milad Shojaeian, Xinyu Wu, Ruochen Ding, Christ Glorieux, Michael Kraft
Research output: Contribution to journal › Article › peer-review