线偏振光和圆偏振光下ZrO₂和Al₂O₃陶瓷材料的飞秒激光烧蚀性能

The effects of linearly polarized and circularly polarized femtosecond laser on the ablation threshold of ZrO₂ and Al₂O₃ ceramics at different pulse numbers were investigated. The surface morphology of the ablated craters was analyzed by optical microscopy and scanning electron microscopy and the depth of the ablated craters was measured by laser scanning confocal microscopy. The results show that the saturation ablation threshold of the two materials at linearly polarized light is smaller than that of circularly polarized light. The saturation ablation threshold of ZrO₂ is smaller than that of Al₂O₃ at the same polarization state. With the increase of pulse numbers, the surface structures of ZrO₂ ablation craters develop from disorder to order, and periodic layer annular ripple structures and nanohole arrays are observed at linear and circular polarized light. Compared with linearly polarized light, the effect of circularly polarized light on the depth of ablated craters is stronger, and surface morphology is more sensitive to the change of laser fluence, at the same time, the periodic structures are more obvious.