碳化硅纳米抛光亚表面损伤机理的分子动力学模拟

Translated title of the contribution: A Molecular Dynamics Simulation on the Subsurface Damage Mechanism in the Nano-polishing Process of Silicon Carbide

Dongpeng Hua, Qing Zhou, Wan Wang, Shuo Li, Zhijun Wang, Haifeng Wang

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

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Material Science

Engineering