数字微镜器件光谱成像技术进展

In recent years， digital micromirror device （DMD）， as a flexible， programmable， and independently addressable spatial light modulation device， has been widely used in maskless lithography， beam shaping， holographic imaging， confocal measurement， and other fields. The flexible modulation mode also gives DMD unique advantages in spectral imaging. It can flexibly modulate the imaging field of view， replacing the traditional mechanical mask and scanning structure. In this study， DMD’s research progress and application in spectral imaging in recent years was reviewed. The basic structure and working principle of the optical system of the aperture-coded and push-broom spectral imaging system based on DMD were discussed in detail and the development of a spectral imaging system based on DMD from Hadamard transform spectral imaging to push-broom spectral imaging was summarized. The relevant research work to overcome the DMD’s diffraction owing to the micro-mirror and inclination of the image plane was introduced. Finally， The unique advantages of spectral imaging technology based on DMD was summarized and the future development direction and application prospect of spectral imaging technology based on DMD was discussed .