Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors

Yilin Qu; Feng Jin; Jiashi Yang

doi:10.3390/mi13081243

Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors

Yilin Qu, Feng Jin, Jiashi Yang

科研成果: 期刊稿件 › 文章 › 同行评审

7 引用（Scopus）

摘要

We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure.

源语言	英语
文章编号	1243
期刊	Micromachines
卷	13
期	8
DOI	https://doi.org/10.3390/mi13081243
出版状态	已出版 - 8月 2022
已对外发布	是

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@article{12070b7ac35b49189f528d09f85098b1,

title = "Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors",

abstract = "We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure.",

keywords = "beam, flexoelectric, gyroscope, vibration",

author = "Yilin Qu and Feng Jin and Jiashi Yang",

note = "Publisher Copyright: {\textcopyright} 2022 by the authors.",

year = "2022",

month = aug,

doi = "10.3390/mi13081243",

language = "英语",

volume = "13",

journal = "Micromachines",

issn = "2072-666X",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "8",

}

TY - JOUR

T1 - Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors

AU - Qu, Yilin

AU - Jin, Feng

AU - Yang, Jiashi

PY - 2022/8

Y1 - 2022/8

N2 - We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure.

AB - We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure.

KW - beam

KW - flexoelectric

KW - gyroscope

KW - vibration

UR - http://www.scopus.com/inward/record.url?scp=85137588822&partnerID=8YFLogxK

U2 - 10.3390/mi13081243

DO - 10.3390/mi13081243

M3 - 文章

AN - SCOPUS:85137588822

SN - 2072-666X

VL - 13

JO - Micromachines

JF - Micromachines

IS - 8

M1 - 1243

ER -

Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors

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