Ultra-small capacitance sensing circuit based on a piece of ASIC

Min Hu, Xiao Ying Li, Hong Long Chang, Qing Hua Jiang

科研成果: 期刊稿件文章同行评审

3 引用 (Scopus)

摘要

A circuit based on a piece of Applications Specific Integrated Circuit (ASIC) HT133 for sensing ultra-small capacitance is presented. It has some prominent features such as high resolution, high anti-interference ability, offset adjustment ability and both analog and digital signal output modes. Implementation of every module and means of noise limitation are described detailedly. An experiment measurement of a series of small capacitances is performed. Results show that the circuit has very high performance with resolution of 0.5 femtofarad (0.5 × 10-15 farad) and nonlinearity of 8.67%. A basis for this ASIC to be applied in capacitive sensors especially micro-electro-mechanical system (MEMS) sensors is provided.

源语言英语
页(从-至)379-382
页数4
期刊Jiliang Xuebao/Acta Metrologica Sinica
28
4
出版状态已出版 - 10月 2007

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