摘要
A circuit based on a piece of Applications Specific Integrated Circuit (ASIC) HT133 for sensing ultra-small capacitance is presented. It has some prominent features such as high resolution, high anti-interference ability, offset adjustment ability and both analog and digital signal output modes. Implementation of every module and means of noise limitation are described detailedly. An experiment measurement of a series of small capacitances is performed. Results show that the circuit has very high performance with resolution of 0.5 femtofarad (0.5 × 10-15 farad) and nonlinearity of 8.67%. A basis for this ASIC to be applied in capacitive sensors especially micro-electro-mechanical system (MEMS) sensors is provided.
源语言 | 英语 |
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页(从-至) | 379-382 |
页数 | 4 |
期刊 | Jiliang Xuebao/Acta Metrologica Sinica |
卷 | 28 |
期 | 4 |
出版状态 | 已出版 - 10月 2007 |