摘要
Thermodynamics phase diagram of ZrB 2-SiC co-deposited from precursors of ZrCl 4-BCl 3-CH 3SiCl 3 (methyltrichlorosilane, MTS)-H 2-Ar has been investigated in detail by using the FactSage code and its embedded database (130 species being involved). The yields of condensed phases in the co-deposition process have been examined as the functions of the inject reactant ratios of BCl 3 / (BCl 3 + MTS) and H 2 / (ZrCl 4 + BCl 3 + MTS), and the temperature at a fixed pressure of 5 kPa. The results show that their yields strongly depend on the molar ratios of the inject reactants and the temperature. Consequently, the pure ZrB 2-SiC composite without free C, B 4C, ZrC and ZrSi can be co-deposited under the ideal condition by adjusting the reactant ratios and the temperature. The gas-phase equilibrium concentration distribution shows that the high input amount of H 2 is favorable for the co-deposition of ZrB 2 and SiC at a fixed ratio of ZrCl 4:BCl 3:MTS:Ar. In the end, the theoretical results can lay down guidelines for increasing the experimental yields of ZrB 2 and SiC.
| 源语言 | 英语 |
|---|---|
| 页（从-至） | 7030-7034 |
| 页数 | 5 |
| 期刊 | Thin Solid Films |
| 卷 | 520 |
| 期 | 23 |
| DOI | |
| 出版状态 | 已出版 - 30 9月 2012 |