TY - JOUR
T1 - The surface leakage currents of CdZnTe wafers
AU - Zha, Gangqiang
AU - Jie, Wanqi
AU - Tan, Tingting
AU - Li, Peisen
PY - 2007/1/30
Y1 - 2007/1/30
N2 - The surface leakage currents (SLCs) and surface sheet resistances (SSRs) of CdZnTe (1 1 0), (1 1 1) A and (1 1 1) B surfaces after etching with Br-MeOH solution, chemo-mechanical polishing (CMP) and passivation were measured in the parallel stripe model, respectively. Meanwhile the surface compositions were determined by X-ray photoelectron spectroscopy (XPS). Te enrichment introduced by etching with Br-MeOH resulted in the increase of the SLCs of CdZnTe wafers. After chemo-mechanical polishing, Te enrichment was removed, and SLCs decreased. CdZnTe (1 1 1) B without Te enrichment possesses higher SLC than that of (1 1 1) A, and (1 1 0) surface has the lowest SLC, which should be attributed to the lower surface dangling bonds. Passivation treatment with NH 4 F + H 2 O 2 is an effective method to decrease SLCs of CdZnTe, by which the SLC was decreased two orders.
AB - The surface leakage currents (SLCs) and surface sheet resistances (SSRs) of CdZnTe (1 1 0), (1 1 1) A and (1 1 1) B surfaces after etching with Br-MeOH solution, chemo-mechanical polishing (CMP) and passivation were measured in the parallel stripe model, respectively. Meanwhile the surface compositions were determined by X-ray photoelectron spectroscopy (XPS). Te enrichment introduced by etching with Br-MeOH resulted in the increase of the SLCs of CdZnTe wafers. After chemo-mechanical polishing, Te enrichment was removed, and SLCs decreased. CdZnTe (1 1 1) B without Te enrichment possesses higher SLC than that of (1 1 1) A, and (1 1 0) surface has the lowest SLC, which should be attributed to the lower surface dangling bonds. Passivation treatment with NH 4 F + H 2 O 2 is an effective method to decrease SLCs of CdZnTe, by which the SLC was decreased two orders.
KW - CdZnTe
KW - Chemo-mechanical polishing
KW - Passivation
KW - Surface leakage current
KW - Surface sheet resistance
UR - http://www.scopus.com/inward/record.url?scp=33846333170&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2006.07.060
DO - 10.1016/j.apsusc.2006.07.060
M3 - 文章
AN - SCOPUS:33846333170
SN - 0169-4332
VL - 253
SP - 3476
EP - 3479
JO - Applied Surface Science
JF - Applied Surface Science
IS - 7
ER -