The simple two-step polydimethylsiloxane transferring process for high aspect ratio microstructures

Shaoxi Wang, Dan Feng, Chenxia Hu, P. Rezai

科研成果: 期刊稿件文章同行评审

6 引用 (Scopus)

摘要

High aspect ratio units are necessary parts of complex microstructures in microfluidic devices. Some methods that are available to achieve a high aspect ratio require expensive materials or complex chemical processes; for other methods it is difficult to reach simple high aspect ratio structures, which need supporting structures. The paper presents a simple and cheap two-step Polydimethylsioxane (PDMS) transferring process to get high aspect ratio single pillars, which only requires covering the PDMS mold with a Brij@52 surface solution after getting a relative PDMS mold based on an SU8 mold. The experimental results demonstrate the method efficiency and effectiveness.

源语言英语
文章编号086001
期刊Journal of Semiconductors
39
8
DOI
出版状态已出版 - 8月 2018

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