System-level modeling of segmented deformable micromirror using multi-port-element network method

This paper presents the development of system-level modeling and simulation of segmented deformable micromirror. We represent a system-level modeling methodology called Multi-Port-Element Network (MuPEN) method for micromirror design which is different from conventional finite-element analysis(FEA) and boundary-element analysis(BEA) method in the paper. Based on this method, the segmented deformable micromirror is decomposed into functional components such as rigid plate-mass, spring beam and electrostatic gap. MuPEN models of functional components have been generated and are coded in MAST language. Then a system-level model of segmented deformable micromirror is established using MuPEN models and both static and dynamic simulation is implemented in SABER. The resonance frequency, the pull-in voltage and the response time of the micromirror are ascertained through different simulations and the simulation results show that the micromirror we designed can satisfy the adaptive optical system requirements. Besides, the frequency analysis results are verified by comparison with ANSYS simulations, and the results prove that MuPEN method has near FEM accuracy. In addition, transient analysis results indicate that the computation cost is low enough and the simulation of complicated electro-mechanical coupled system which is hardly completed by FEM software can be accomplished quickly in this way.