System level modeling and simulation of micromachined capacitive microphone based on parametric element

Peng An, Weizheng Yuan, Chengliang Zhang

科研成果: 期刊稿件文章同行评审

摘要

Nonlinear dynamic control equation of the diaphragm of micromachined capacitive microphone was constructed based on one-dimensional lumped parameter model. Parametric element was developed using hardware description language on commercial software Saber based on this equation. System level modeling and simulation can be realized by connecting the parametric element and the detection circuit under Saber modeling and simulation environment. Time domain, frequency domain simulation and the calculation of pull-in voltage, capacitance with different bias voltage were performed. At last, the simulation results were compared with the experimental results in literatures and FEA numerical results, and the validity of this method was proved.

源语言英语
页(从-至)1518-1522
页数5
期刊Zhongguo Jixie Gongcheng/China Mechanical Engineering
18
13
出版状态已出版 - 10 7月 2007

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