System-level design of segmented piston-like micro deformable mirrors

A system-level behavioral model of segmented piston-like micro deformable mirrors was accomplished by utilizing our own-developed integrated design platform for MEMS CAD. Its validity and veracity were verified using both the finite element method and theoretical method. The structural parametric design of micro deformable mirrors was finished and performances were obtained by system-level simulation. Results show that system-level method can be applied for the design of MEMS devices to greatly improve the efficiency, reduce the period and decrease the cost while maintaining a considerable computing accuracy. And the performances of the designed micro deformable mirrors can meet the requirements for common Adaptive Optics applications.