摘要
The structure and properties of Ti-B-N coatings prepared by radio-frequency plasma-enhanced chemical vapor deposition (rf-PCVD) have been investigated in this work. The coatings were characterized by energy dispersive X-ray analysis (EDX), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and optical microscopy. Ball-on-disk tribometer and microscopic hardness tester were employed in evaluating the mechanical properties of the coatings. The results show that the structure of the coatings is a nanocomposite, where nanocrystalline TiN is embedded in the amorphous BN and TiB2 matrix. Compared with TiN coatings, the micro-hardness of Ti-B-N coatings can reach 40 GPa. The wear resistances of Ti-B-N coatings remarkably increase with a certain addition of boron, which caused the change of friction mechanism of TiN coatings, although its friction coefficient is higher than that of TiN.
源语言 | 英语 |
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页(从-至) | 1597-1600 |
页数 | 4 |
期刊 | Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering |
卷 | 34 |
期 | 10 |
出版状态 | 已出版 - 10月 2005 |
已对外发布 | 是 |