Resolution limit of mode-localised sensors

Zhao Zhang, Honglong Chang

科研成果: 期刊稿件文章同行评审

14 引用 (Scopus)

摘要

In recent years, the mode localisation phenomenon of weakly coupled resonators has been successfully utilised to improve the sensitivity of microelectromechanical system (MEMS) sensors. However, controversy remians about the resolution limits of mode-localised sensors. This paper asks two questions of the community: what are the resolution limits of the mode-localised sensors, and can the resolution improvement be obtained using mode-localised sensing? To answer these questions, we report a series of resolution models of mode-localised sensors. We conclude that mode-localised sensing can realise a higher measuring resolution by orders of magnitude when more than three resonators are weakly coupled, and this will lay the theoretical foundation for a breakthrough for the MEMS sensors industry.

源语言英语
文章编号142401
期刊Science China Information Sciences
64
4
DOI
出版状态已出版 - 4月 2021

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