Research on optical transmittance and electromagnetic shielding effectiveness of TiO2/Cu/TiO2 multilayer film

Linlin Lu, Zhenghua Yang, Jie Xu, Jie Dong

科研成果: 期刊稿件文章同行评审

摘要

TiO2/Cu/TiO2 multilayer films were prepared on quartz glass by magnetron sputtering, and the effects of Cu film thickness on the electrical, optical and electromagnetic shielding performance of TiO2/Cu/TiO2 multilayer films were investigated. The results show that with the increase of Cu film thickness from 14 to 34 nm, the square resistance of TiO2/Cu/TiO2 multilayer films gradually decreases from 13.1 to 3.29 Ω, and the average visible light transmittance of the multilayer films drops from 80.2% to 66.0%. With the increase of Cu film thicknesses, electromagnetic shielding performance of TiO2/Cu/TiO2 multilayer films exhibits an upward trend. The total electromagnetic shielding effectiveness (SET) of TiO2/Cu/TiO2 multilayer film (30/34/30 nm thick) reaches the maximum, and the SET value of the multilayer film exceeds 19 dB.

源语言英语
文章编号113
期刊Journal of Materials Science: Materials in Electronics
36
2
DOI
出版状态已出版 - 1月 2025
已对外发布

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