@inproceedings{ba40463883984918a88d443afbe9007e,
title = "Research on infrared antireflective characteristics of two-dimensional sub-wavelength structures",
abstract = "In order to improve the transmission and durability of infrared optical materials, the antireflection characteristics of two dimensional sub-wavelength structures on infrared optical materials were investigated. The results of numerical modeling showed two dimensional sub-wavelength structures can improve the transmission of infrared optical materials over a broad band, especially pyramid structures. Then two dimensional sub-wavelength structures on Zinc sulfide were fabricated with contacting ultraviolet lithography and reactive ion etching, A substantial antireflection effect was obtained over the wavelength band 8~12 μm. To improve the environmental durability of the antireflective sub-wavelength structures, Germanium carbide film was deposited on the two dimensional sub-wavelength structures by reactive RF magnetron sputtering.",
keywords = "Antireflection characteristics, Film, Reactive ion etching, Rigorous coupled theory, Sub-wavelength structure",
author = "Xu, {Qi Yuan} and Zhao, {Zu Zhen} and Li, {Yang Ping} and Liu, {Zheng Tang} and Xu, {Yong Jin} and Zhu, {Yong Fa}",
year = "2014",
doi = "10.4028/www.scientific.net/AMM.513-517.363",
language = "英语",
isbn = "9783038350125",
series = "Applied Mechanics and Materials",
pages = "363--366",
booktitle = "Applied Science, Materials Science and Information Technologies in Industry",
note = "2014 International Conference on Advances in Materials Science and Information Technologies in Industry, AMSITI 2014 ; Conference date: 11-01-2014 Through 12-01-2014",
}