摘要
An approach to deposit (001) oriented, in-plane-aligned CeO2 buffer layer on rolling-assisted biaxially-textured nickel tapes by ion beam assisted deposition is reported. The CeO2 films grown on the rolling-textured nickel tapes by pulsed laser deposition without ion bombardment show (111) orientation. CeO2 films grown on the rolling-textured nickel tapes by ion beam assisted pulsed laser deposition without introducing hydrogen are (001) oriented at deposition temperature below about 380°C. The full width at half maximum of (111) φ-scan of the (001) cub textured CeO2 films is 9°. The films growing at higher temperature are (111) orientation, no matter they are deposited with ion bombardment or without ion bombardment.
源语言 | 英语 |
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页(从-至) | 2501-2504 |
页数 | 4 |
期刊 | Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films |
卷 | 16 |
期 | 4 |
DOI | |
出版状态 | 已出版 - 1998 |
已对外发布 | 是 |