Parametric model order reduction for squeeze film damping in perforated microstructures

In this paper, a parametric model order reduction (PMOR) method was presented to firstly extract the macromodels of squeeze film damping in perforated microstructures. The various design variables such as flow impedance of perforations, viscosity, ambient pressure, plate thickness and gap separation were preserved in the model order reduction (MOR) process. Thus when these parameters change, the extracted parametric macromodels could be reused parametrically instead of repeating the time-consuming MOR process in the traditional way. A micromachined capacitive accelerometer was used to demonstrate the feasibility and efficiency of the PMOR method for the squeeze film damping in perforated microstructures. The maximum relative error is less than 0.3% while the computational efficiency improves about 11 times compared with finite element method.