TY - JOUR
T1 - One MEMS design tool with maximal six design flows
AU - Chang, Honglong
AU - Xu, Jinghui
AU - Xie, Jianbing
AU - Zhang, Chengliang
AU - Yan, Zijian
AU - Yuan, Weizheng
PY - 2008/6
Y1 - 2008/6
N2 - This paper presents one MEMS design tool with a total six of design flows, which makes it possible that the MEMS designers choose the most suitable design flow for their specific devices. The design tool is divided into three levels and interconnected by six interfaces. The three levels are the lumped-element model based system level, finite element analysis based device level and process level, which cover nearly all modeling and simulation functions for MEMS design. The six interfaces are proposed to automatically transmit the design data between every two levels, thus the maximal six design flows could be realized. The interfaces take the netlist, solid model and layout as the data inlet and outlet for the system, device and process level respectively. The realization of these interfaces are presented and verified by design examples, which also proves that enough flexibility in the design flow can really increase the design efficiency.
AB - This paper presents one MEMS design tool with a total six of design flows, which makes it possible that the MEMS designers choose the most suitable design flow for their specific devices. The design tool is divided into three levels and interconnected by six interfaces. The three levels are the lumped-element model based system level, finite element analysis based device level and process level, which cover nearly all modeling and simulation functions for MEMS design. The six interfaces are proposed to automatically transmit the design data between every two levels, thus the maximal six design flows could be realized. The interfaces take the netlist, solid model and layout as the data inlet and outlet for the system, device and process level respectively. The realization of these interfaces are presented and verified by design examples, which also proves that enough flexibility in the design flow can really increase the design efficiency.
UR - http://www.scopus.com/inward/record.url?scp=43049122057&partnerID=8YFLogxK
U2 - 10.1007/s00542-007-0546-3
DO - 10.1007/s00542-007-0546-3
M3 - 文章
AN - SCOPUS:43049122057
SN - 0946-7076
VL - 14
SP - 775
EP - 785
JO - Microsystem Technologies
JF - Microsystem Technologies
IS - 6
ER -