One MEMS design tool with maximal six design flows

Honglong Chang, Jinghui Xu, Jianbing Xie, Chengliang Zhang, Zijian Yan, Weizheng Yuan

科研成果: 期刊稿件文章同行评审

2 引用 (Scopus)

摘要

This paper presents one MEMS design tool with a total six of design flows, which makes it possible that the MEMS designers choose the most suitable design flow for their specific devices. The design tool is divided into three levels and interconnected by six interfaces. The three levels are the lumped-element model based system level, finite element analysis based device level and process level, which cover nearly all modeling and simulation functions for MEMS design. The six interfaces are proposed to automatically transmit the design data between every two levels, thus the maximal six design flows could be realized. The interfaces take the netlist, solid model and layout as the data inlet and outlet for the system, device and process level respectively. The realization of these interfaces are presented and verified by design examples, which also proves that enough flexibility in the design flow can really increase the design efficiency.

源语言英语
页(从-至)775-785
页数11
期刊Microsystem Technologies
14
6
DOI
出版状态已出版 - 6月 2008

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