摘要
The nounique phenomenon of rocking curve on the (111) surfaces of CdZnTe wafers was first discovered in X-ray diffraction measurement. The reason of the nounique phenomenon of rocking curve came into being was that both (333) plane and (3̄3̄3̄) plane meet the Bragg diffraction. Two diffraction peaks were recorded in X-ray diffraction measurement in the course of 360° of rotation about phi axis. By optimizing each diffraction peak, we obtained two rocking curves. One rocking curve is from the (333) plane, and the other is from the (3̄3̄3̄) plane. After analyzing the scattered capacity of (333) plane and (3̄3̄3̄) planes to X-ray, we concluded that the diffraction intensity of the (333) plane is smaller than that of the (3̄3̄3̄) plane, and the intensity of the rocking curve on (333) plane is also smaller than that of the (3̄3̄3̄) plane.
源语言 | 英语 |
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页(从-至) | 80-83 |
页数 | 4 |
期刊 | Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors |
卷 | 28 |
期 | SUPPL. |
出版状态 | 已出版 - 9月 2007 |