@inproceedings{6248dc0d66e64a1c8f7b7d2f3135bf63,
title = "New insights into shape memory alloy bimorph actuators formed by electron beam evaporation",
abstract = "In order to create shape memory alloy (SMA) bimorph microactuators with high-precision features, a novel fabrication process combined with electron beam (E-beam) evaporation, lift-off resist and isotropic XeF2 dry etching method was developed. To examine the effect of E-beam deposition and annealing process on nitinol (NiTi) characteristics, the NiTi thin film samples with different deposition rate and overflow conditions during annealing process were investigated. With the characterizations using scanning electron microscope and x-ray diffraction, the results indicated that low E-beam deposition rate and argon employed annealing process could benefit the formation of NiTi crystalline structure. Besides, SMA bimorph microactuators with high-precision features as small as 5 microns were successfully fabricated. Furthermore, the thermomechanical performance was experimentally verified and compared with finite element analysis simulation results.",
keywords = "Annealing, Bimorph, Electron beam evaporation, Lift-off resist, Microactuators, Microfabrication, NiTi, Shape memory alloy, X-ray diffraction, XeF2 dry etching",
author = "Hao Sun and Jianjun Luo and Ming Lu and Dmytro Nykypanchuk and Yong Shi",
note = "Publisher Copyright: Copyright {\textcopyright} 2018 ASME.; ASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2018 ; Conference date: 26-08-2018 Through 29-08-2018",
year = "2018",
doi = "10.1115/DETC2018-85812",
language = "英语",
series = "Proceedings of the ASME Design Engineering Technical Conference",
publisher = "American Society of Mechanical Engineers (ASME)",
booktitle = "23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems",
}