New gas sensor head without gas chamber by hollow core PBF

Zhou Xuewu, Hou Jianping, Zhao Jianlin

科研成果: 书/报告/会议事项章节会议稿件同行评审

1 引用 (Scopus)

摘要

A reflecting optical-fiber gas sensor head structure without gas chamber by PBF was reported. It could be used in real-time detection of gas concentration in micro-machinery. For this sensor head, a PBF fiber was used for both transmitting and sensing, a micro-concave mirror and a gas filter were fixed to the one end of the PBF, and the other end of the PBF was connected to a special open coupler in a vacuum box. Gas could transmit and fill the full hollow core area of the PBF by means of negative pressure. The characteristic of gas transmitting in the PBF was simulated with a simplified model by choosing appropriate type and parameters of the PBF. The mass flow rate, the average period of transmission and the relation between the length of PBF and the average period of transmission in different negative pressure were worked out. The result shows that the average period of transmission was proportional to the square of the length of PBF. This PBF gas sensor has its own superiority: (1)Gas transmitting is driven by negative pressure of vacuum pump in the hollow core of the PBF, then the sensor's response time can be improved to less than 10 seconds. (2)With smaller size of sensor head, the interference of the sensor's entrance can be reduced. (3)Without gas chamber, the sensor like a probe, so it can be used in more areas, especially for MEMS system.

源语言英语
主期刊名3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies
主期刊副标题Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
DOI
出版状态已出版 - 2007
活动3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - Chengdu, 中国
期限: 8 7月 200712 7月 2007

出版系列

姓名Proceedings of SPIE - The International Society for Optical Engineering
6724
ISSN(印刷版)0277-786X

会议

会议3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
国家/地区中国
Chengdu
时期8/07/0712/07/07

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