TY - JOUR
T1 - Multiple-domain coupling analysis based on lumped parameter macromodel for micromachined gyroscope
AU - Yuan, Weizheng
AU - Lu, Xianglian
AU - Li, Weijian
PY - 2006/2/25
Y1 - 2006/2/25
N2 - The multiple domain of micromachined gyroscope was decomposed into elastic field, electrostatic field and air-damping field. The lumped parameter model for every domain, therefore, was utilized to analyze its coupling effects. With edge-effect considered, the analytical equation between capacitance and displacement was obtained, the damping coefficients and squeeze stiffness coefficients of MEMS structures with perforation holes, the equivalent stiffness and mass were also computed respectively. At last, the system simulation under different conditions was accomplished by inserting the obtained lumped parameter models into a system level simulator.
AB - The multiple domain of micromachined gyroscope was decomposed into elastic field, electrostatic field and air-damping field. The lumped parameter model for every domain, therefore, was utilized to analyze its coupling effects. With edge-effect considered, the analytical equation between capacitance and displacement was obtained, the damping coefficients and squeeze stiffness coefficients of MEMS structures with perforation holes, the equivalent stiffness and mass were also computed respectively. At last, the system simulation under different conditions was accomplished by inserting the obtained lumped parameter models into a system level simulator.
KW - Lumped parameter macromodel
KW - MEMS
KW - Micromachined gyroscope
KW - Multiple-domain coupling analysis
UR - http://www.scopus.com/inward/record.url?scp=33645783204&partnerID=8YFLogxK
M3 - 文章
AN - SCOPUS:33645783204
SN - 1004-132X
VL - 17
SP - 401
EP - 405
JO - Zhongguo Jixie Gongcheng/China Mechanical Engineering
JF - Zhongguo Jixie Gongcheng/China Mechanical Engineering
IS - 4
ER -